EBD-CDR BOOT for 3D CD Metrology
diamond-like hardness for long lasting performance 

TIP
Boot widths from 10 to 130 nm
Overhang: 5 - 30 nm / Edge radius: 5 nm
Unchanging vertical edge height of 10 nm 
Download full spec sheet

APPLICATIONS
The probe of choice for 3D CD metrology
Significantly improved lifetime
Improved reliability and throughput
Link to publication

COMPATIBILITY
Compatible with all major
commercially available AFM's. 
Featuring standard cantilevers
and chip dimensions.

QUALITY CONTROL
ISO 9001 certified since 2008.
Every probe measured and quality inspected, datasheet with exact TrueDimensions™ of every probe.