T-shape-like CDR AFM tips for improved reliability and throughput in 3D CD metrology applications.
f = 320 kHz | k = 40 N/m | effect. length = 200 nm | w = 50 nm
Tip widths of 50 nm for the reconstruction of finest 3D reentrant structures.
5 nm tip edge radius for high resolution sidewall roughness measurements.
Significantly improved lifetime compared to CD AFM tips made from silicon.
Delivered with TrueDimensions™:
- SEM image of every tip
- Each tip length and width measured in Hi-Res SEM
- Datasheet for every single probe available 24/7 via QR code
Currently not available online.
Ships in less than 4 weeks.